微机电系统技术及其在航天器上的应用展望

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Abstract: Micro．electro-mechanical system(MEMS)is a micro component or a system which is composed of microstructures，micro sensors，micro actuators and signal processing circuits，control circuits，kinds of interfaces，communication cables，power--supplies．As the science and technology develop，MEMS is improved in precision and reliability，and，therefore，is widely used．This paper presents the technical characteristics，key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed．

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TP271．4

SHEN Kun. Technology of MEMS and Applications in Spacecraft[J].Aerospace Contrd and Application, 2008, 34(1): 56-59.

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Technology of MEMS and Applications in Spacecraft

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